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3차원 MEMS 소자 제작을 위한 기판 직접 접합법의 최적화 연구

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Authors
민홍석
Advisor
주영창
Issue Date
2002
Publisher
서울대학교 대학원
Description
학위논문(석사)--서울대학교 대학원 :재료공학부,2002.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000061393

http://hdl.handle.net/10371/30379
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Material Science and Engineering (재료공학부) Theses (Master's Degree_재료공학부)
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