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MEMS용 Si 소재의 온도에 따른 탄성특성 변화에 관한 연구

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Authors
정성훈
Advisor
권동일
Issue Date
2002
Publisher
서울대학교 대학원
Description
학위논문(석사)--서울대학교 대학원 :재료공학부,2002.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000060785

http://hdl.handle.net/10371/30402
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Material Science and Engineering (재료공학부) Theses (Master's Degree_재료공학부)
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