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Two-zone 확산법을 이용한 실리콘 박막으로의 Phosphorus 도핑에 관한 연구(A study on the phosphorus doping in silicon thin film using two-zone diffusion method)
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 김형준 | - |
| dc.contributor.author | 황민욱 | - |
| dc.date.accessioned | 2010-01-15T02:39:11Z | - |
| dc.date.available | 2010-01-15T02:39:11Z | - |
| dc.date.copyright | 2000. | - |
| dc.date.issued | 2000 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000068539 | kor |
| dc.identifier.uri | https://hdl.handle.net/10371/30507 | - |
| dc.description | 학위논문(석사)--서울대학교 대학원 :무기재료공학과,2000. | ko |
| dc.format.extent | xi, 89 장 | ko |
| dc.language.iso | ko | ko |
| dc.publisher | 서울대학교 대학원 | ko |
| dc.title | Two-zone 확산법을 이용한 실리콘 박막으로의 Phosphorus 도핑에 관한 연구(A study on the phosphorus doping in silicon thin film using two-zone diffusion method) | ko |
| dc.type | Thesis | - |
| dc.contributor.department | 무기재료공학과 | - |
| dc.description.degree | Master | ko |
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