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아르곤질소 혼합기체를 이용하여 스퍼터링 증착한 Cu 박막에서의 미세구조의 조절

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Authors
안응진
Advisor
윤의준
Issue Date
2000
Publisher
서울대학교 대학원
Description
학위논문(석사)--서울대학교 대학원 :무기재료공학과,2000.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000068474

http://hdl.handle.net/10371/30521
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Material Science and Engineering (재료공학부) Theses (Master's Degree_재료공학부)
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