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고주파 스퍼터링법으로 증착한 ZnO 박막의 응력 형성과 박막 특성에 미치는 영향

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Authors
곽상현
Advisor
김형준
Issue Date
2000
Publisher
서울대학교 대학원
Description
학위논문(석사)--서울대학교 대학원 :무기재료공학과,2000.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000068438

http://hdl.handle.net/10371/30531
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Material Science and Engineering (재료공학부) Theses (Master's Degree_재료공학부)
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