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Development of large-area, multi-helicon plasma source for TFT-LCD processing : 다중 헬리콘 방전을 이용한 TFT-LCD 공정용 대면적 플라즈마원 개발
DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 황용석 | - |
dc.contributor.author | 김윤재 | - |
dc.date.accessioned | 2010-01-16T11:38:42Z | - |
dc.date.available | 2010-01-16T11:38:42Z | - |
dc.date.copyright | 2002. | - |
dc.date.issued | 2002 | - |
dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000061868 | eng |
dc.identifier.uri | https://hdl.handle.net/10371/33861 | - |
dc.description | Thesis (master`s)--서울대학교 대학원 :원자핵공학과,2002. | en |
dc.format.extent | vi, 73 leaves | en |
dc.language.iso | en | en |
dc.publisher | 서울대학교 대학원 | en |
dc.title | Development of large-area, multi-helicon plasma source for TFT-LCD processing | en |
dc.title.alternative | 다중 헬리콘 방전을 이용한 TFT-LCD 공정용 대면적 플라즈마원 개발 | - |
dc.type | Thesis | - |
dc.contributor.department | 원자핵공학과 | - |
dc.description.degree | Master | en |
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