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Deposition and characterization of low-dielectric-constant SiOC thin films for interlayer dielectrics of multilevel interconnection
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 김형준 | - |
| dc.contributor.author | 김윤해 | - |
| dc.date.accessioned | 2010-01-17T02:13:11Z | - |
| dc.date.available | 2010-01-17T02:13:11Z | - |
| dc.date.copyright | 2002. | - |
| dc.date.issued | 2002 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000060883 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/35426 | - |
| dc.description | Thesis (doctoral)--서울대학교 대학원 :재료공학부,2002. | en |
| dc.format.extent | xxii, 165 leaves | en |
| dc.language.iso | en | en |
| dc.publisher | 서울대학교 대학원 | en |
| dc.subject | interconnection | en |
| dc.subject | 배선 | en |
| dc.subject | interlayer dielectric(ILD) | en |
| dc.subject | 층간 절연막 | en |
| dc.subject | cpapcitance | en |
| dc.subject | 정전용량 | en |
| dc.subject | dielectric constant | en |
| dc.subject | 유전상수 | en |
| dc.subject | RC delay | en |
| dc.subject | 신호지연 | en |
| dc.subject | low dielectric constant | en |
| dc.title | Deposition and characterization of low-dielectric-constant SiOC thin films for interlayer dielectrics of multilevel interconnection | en |
| dc.type | Thesis | - |
| dc.contributor.department | 재료공학부 | - |
| dc.description.degree | Doctor | en |
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