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백금박막의 우성배향성 조절과 거대 입성장에 관한 연구 : The Study on the preferred orientation control and the giant grain growth of Pt films
DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 윤의준 | - |
dc.contributor.author | 이동수 | - |
dc.date.accessioned | 2010-01-17T02:34:46Z | - |
dc.date.available | 2010-01-17T02:34:46Z | - |
dc.date.copyright | 2001. | - |
dc.date.issued | 2001 | - |
dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000063458 | kor |
dc.identifier.uri | https://hdl.handle.net/10371/35508 | - |
dc.description | 학위논문(박사)--서울대학교 대학원 :재료공학부,2001. | ko |
dc.format.extent | p. | ko |
dc.language.iso | ko | ko |
dc.publisher | 서울대학교 대학원 | ko |
dc.subject | 백금박막 | ko |
dc.subject | Platinum thin film | ko |
dc.subject | 우선배향성 | ko |
dc.subject | preferred orientation | ko |
dc.subject | 스퍼터링 | ko |
dc.subject | sputtering | ko |
dc.subject | 거대 입성장 | ko |
dc.subject | giant grain growth | ko |
dc.subject | 아르곤+산소 | ko |
dc.title | 백금박막의 우성배향성 조절과 거대 입성장에 관한 연구 | ko |
dc.title.alternative | The Study on the preferred orientation control and the giant grain growth of Pt films | ko |
dc.type | Thesis | - |
dc.contributor.department | 재료공학부 | - |
dc.description.degree | Doctor | ko |
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