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백금박막의 우성배향성 조절과 거대 입성장에 관한 연구 : The Study on the preferred orientation control and the giant grain growth of Pt films

DC Field Value Language
dc.contributor.advisor윤의준-
dc.contributor.author이동수-
dc.date.accessioned2010-01-17T02:34:46Z-
dc.date.available2010-01-17T02:34:46Z-
dc.date.copyright2001.-
dc.date.issued2001-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000063458kor
dc.identifier.urihttps://hdl.handle.net/10371/35508-
dc.description학위논문(박사)--서울대학교 대학원 :재료공학부,2001.ko
dc.format.extentp.ko
dc.language.isokoko
dc.publisher서울대학교 대학원ko
dc.subject백금박막ko
dc.subjectPlatinum thin filmko
dc.subject우선배향성ko
dc.subjectpreferred orientationko
dc.subject스퍼터링ko
dc.subjectsputteringko
dc.subject거대 입성장ko
dc.subjectgiant grain growthko
dc.subject아르곤+산소ko
dc.title백금박막의 우성배향성 조절과 거대 입성장에 관한 연구ko
dc.title.alternativeThe Study on the preferred orientation control and the giant grain growth of Pt filmsko
dc.typeThesis-
dc.contributor.department재료공학부-
dc.description.degreeDoctorko
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