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나노임프린트 리소그래피 충전 공정의 가압력 해석과 버블 결함 생성 조건 : Analysis of the mold pressure and the conditions of bubble defect formation in the filling process of nanoimprint lithography
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 신효철 | - |
| dc.contributor.author | 이영훈 | - |
| dc.date.accessioned | 2010-01-21T15:56:27Z | - |
| dc.date.available | 2010-01-21T15:56:27Z | - |
| dc.date.copyright | 2009 | - |
| dc.date.issued | 2009 | - |
| dc.identifier.other | 000000038148 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000038148 | - |
| dc.description | 학위논문(박사)--서울대학교 대학원 :기계항공공학부,2009.8. | - |
| dc.format.extent | xi, 127 장 | - |
| dc.language.iso | ko | - |
| dc.publisher | 서울대학교 대학원 | - |
| dc.subject | 나노임프린트 리소그래피 | - |
| dc.subject | Nanoimprint lithography | - |
| dc.subject | 벽면 미끄러짐 | - |
| dc.subject | Wall slip | - |
| dc.subject | 접촉각 | - |
| dc.subject | Contact angle | - |
| dc.subject | 버블 | - |
| dc.subject | Bubble | - |
| dc.subject | 몰드 | - |
| dc.subject | Mold | - |
| dc.title | 나노임프린트 리소그래피 충전 공정의 가압력 해석과 버블 결함 생성 조건 | - |
| dc.title.alternative | Analysis of the mold pressure and the conditions of bubble defect formation in the filling process of nanoimprint lithography | - |
| dc.type | Thesis | - |
| dc.contributor.department | 기계항공공학부 | - |
| dc.description.degree | 학위논문(박사) -- | - |
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