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Fabrication of metal pattern using unconventional lithography and Cu electroplating method : 비전통 리소그래피법과 구리 도금법을 이용한 금속 패턴의 제작
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이홍희 | - |
| dc.contributor.author | 원영준 | - |
| dc.date.accessioned | 2010-01-25T07:24:23Z | - |
| dc.date.available | 2010-01-25T07:24:23Z | - |
| dc.date.copyright | 2007. | - |
| dc.date.issued | 2007 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000045636 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/43542 | - |
| dc.description | Thesis(master`s)--서울대학교 대학원 :협동과정 나노과학기술전공,2007. | en |
| dc.format.extent | vi, 33 leaves | en |
| dc.language.iso | en | en |
| dc.publisher | 서울대학교 대학원 | en |
| dc.subject | 전기 도금법 | en |
| dc.subject | Rapid flash patterning(RFP) | en |
| dc.subject | 구리 | en |
| dc.subject | electroplating | en |
| dc.subject | 광학기기 | en |
| dc.subject | copper | en |
| dc.subject | 소프트리소그래피법 | en |
| dc.subject | optical device | en |
| dc.title | Fabrication of metal pattern using unconventional lithography and Cu electroplating method | en |
| dc.title.alternative | 비전통 리소그래피법과 구리 도금법을 이용한 금속 패턴의 제작 | en |
| dc.type | Thesis | - |
| dc.contributor.department | 협동과정 나노과학기술전공 | - |
| dc.description.degree | Master | en |
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