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Low-pressure datachment nanolithography

DC Field Value Language
dc.contributor.advisor서갑양-
dc.contributor.author김재관-
dc.date.accessioned2010-01-25T08:36:27Z-
dc.date.available2010-01-25T08:36:27Z-
dc.date.copyright2006.-
dc.date.issued2006-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000047550eng
dc.identifier.urihttps://hdl.handle.net/10371/43789-
dc.descriptionThesis(master`s)--서울대학교 대학원 :기계항공공학부,2006.en
dc.format.extentviii, 43 leavesen
dc.language.isoenen
dc.publisher서울대학교 대학원en
dc.subject박리en
dc.subjectDetachmenten
dc.subject나노 제조en
dc.subjectNano fabricationen
dc.subject접착en
dc.subjectadhesionen
dc.subject고분자en
dc.subjectpolymeren
dc.titleLow-pressure datachment nanolithographyen
dc.typeThesis-
dc.contributor.department기계항공공학부-
dc.description.degreeMasteren
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