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Development of a dome shape thin membrane transducer based on microlens process : 마이크로렌즈 공정에 기반한 돔형 초박막 트랜스듀서 개발
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- Authors
- Advisor
- 이정훈
- Issue Date
- 2007
- Publisher
- 서울대학교 대학원
- Keywords
- Thin membrane ; Thin membrane ; PDMS ; PDMS ; capacitive sensor ; capacitive sensor ; DNA ; DNA ; microlens process ; microlens
- Description
- 학위논문(석사) --서울대학교 대학원 :기계항공공학부,2007.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000043735
https://hdl.handle.net/10371/43816
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