Study on etching characteristics and mechanism using the blower type atmospheric pressure plasma

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Study on etching characteristics and mechanism using the blower type atmospheric pressure plasma

DC Field	Value	Language
dc.contributor.advisor	김곤호	-
dc.contributor.author	권호철	-
dc.date.accessioned	2010-01-25T23:34:59Z	-
dc.date.available	2010-01-25T23:34:59Z	-
dc.date.copyright	2008.	-
dc.date.issued	2008	-
dc.identifier.uri	http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000039731	eng
dc.identifier.uri	https://hdl.handle.net/10371/44228	-
dc.description	학위논문(석사) --서울대학교 대학원 :에너지시스템공학부,2008.2.	en
dc.format.extent	x, 68 leaves.	en
dc.language.iso	en	en
dc.publisher	서울대학교 대학원	en
dc.subject	분사형	en
dc.subject	blower type atmospheric pressure plasma	en
dc.subject	대기압 플라즈마	en
dc.subject	atmospheric pressure plasma	en
dc.subject	유전체 격벽 플라즈마	en
dc.subject	dielectric barrier discharge	en
dc.subject	비정질 실리콘	en
dc.subject	chemically active species	en
dc.subject	비정질 실리콘 식각	en
dc.subject	amorphous silicon (a-Si)	en
dc.subject	식각 공정	en
dc.subject	a-Si etching	en
dc.subject	식각 반응	en
dc.subject	etching process	en
dc.subject	TFT-LCD	en
dc.subject	effective reaction time	en
dc.subject	대기압 플라즈마	en
dc.subject	TFT-LCD	en
dc.title	Study on etching characteristics and mechanism using the blower type atmospheric pressure plasma	en
dc.type	Thesis	-
dc.contributor.department	에너지시스템공학부	-
dc.description.degree	Master	en

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