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MEMS 열 액츄에이터의 최적설계 및 실험적 검증 : Design optimization and experimental verification for micro thermal actuators
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- Authors
- Advisor
- 김윤영
- Issue Date
- 2006
- Publisher
- 서울대학교 대학원
- Keywords
- 초소형 열 액츄에이터 ; Micro thermal actuators ; 회전형 열 액츄에이터 ; Rotary thermal actuator ; 다물리 시스템 ; Multi-physics system ; 위상최적설계 ; Topology optimization ; 요소 연결 매개법 ; Element Connectivity Parameterization(ECP) method ; 최소 선폭 조절기법 ; Minimum Thickness Control(MTC) method ; 강건최적설계 ; Robustness ; MEMS ; MEMS
- Description
- 학위논문(박사)--서울대학교 대학원 :기계항공공학부,2006.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000048724
https://hdl.handle.net/10371/44278
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