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Wavelet 변환을 이용한 파장 주사 간섭계에서의 박막 두께 형상 측정 : Thin-film thickness profile measurement using wavelet transform in wavelength scanning interferometry
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 박희재 | - |
| dc.contributor.author | 황영민 | - |
| dc.date.accessioned | 2010-01-26 | - |
| dc.date.available | 2010-01-26 | - |
| dc.date.copyright | 2005. | - |
| dc.date.issued | 2005 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000052268 | kog |
| dc.identifier.uri | https://hdl.handle.net/10371/44334 | - |
| dc.description | 학위논문(박사)--서울대학교 대학원 :기계항공공학부,2005. | ko |
| dc.format.extent | xiv, 122 장 | ko |
| dc.language.iso | ko | ko |
| dc.publisher | 서울대학교 대학원 | ko |
| dc.subject | 투명 박막 | ko |
| dc.subject | Transparent Thin Film | ko |
| dc.subject | 형상 측정 | ko |
| dc.subject | Wavelength Scanning Interferometry | ko |
| dc.subject | 파장 주사 간섭계 | ko |
| dc.subject | AOTF(Acousto-Optic Tunable Filter) | ko |
| dc.subject | 음향광학변조필터(AOTF) | ko |
| dc.subject | Wavelet Transform | ko |
| dc.subject | Wavelet 변환 | ko |
| dc.subject | Phase Retrieval | ko |
| dc.subject | 위상 복원 | ko |
| dc.title | Wavelet 변환을 이용한 파장 주사 간섭계에서의 박막 두께 형상 측정 | ko |
| dc.title.alternative | Thin-film thickness profile measurement using wavelet transform in wavelength scanning interferometry | ko |
| dc.type | Thesis | - |
| dc.contributor.department | 기계항공공학부 | - |
| dc.description.degree | Doctor | ko |
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