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압전구동기와 탄성힌지를 이용한 대변위 Z축 스테이지 개발 : Developement of long range Z-axis Stage using the Piezo Actuator and Elastic Hinge
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- Authors
- Advisor
- 박희재
- Issue Date
- 2005
- Publisher
- 서울대학교 대학원
- Keywords
- 초정밀 스테이지 ; PZT actuator ; 압전소자 구동기 ; flexure hinge ; 초정밀 위치제어 ; Notch hinge ; 시스템 추정 ; Leaf spring ; 탄성힌지 ; Position control ; precision stage
- Description
- 학위논문(석사)--서울대학교 대학원 :기계항공공학부,2005.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000051121
https://hdl.handle.net/10371/44429
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