Publications
Detailed Information
연속체 가정을 통한 나노 임프린트 리소그래피 공정 해석
DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 이우일 | - |
dc.contributor.author | 정장희 | - |
dc.date.accessioned | 2010-01-26T03:51:52Z | - |
dc.date.available | 2010-01-26T03:51:52Z | - |
dc.date.copyright | 2004. | - |
dc.date.issued | 2004 | - |
dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000056274 | kog |
dc.identifier.uri | https://hdl.handle.net/10371/44465 | - |
dc.description | 학위논문(석사)--서울대학교 대학원 :기계항공공학부,2004. | ko |
dc.format.extent | 45 장 | ko |
dc.language.iso | ko | ko |
dc.publisher | 서울대학교 대학원 | ko |
dc.subject | 나노 임프린트 리소그래피(NIL) | ko |
dc.subject | Nano-imprint-lithography | ko |
dc.subject | 수치해석 | ko |
dc.subject | Numerical simulation | ko |
dc.subject | 표면 장력 | ko |
dc.subject | Surface tension | ko |
dc.subject | 접촉각 | ko |
dc.subject | Contact angle | ko |
dc.subject | 슬립(slip) | ko |
dc.subject | Slip | ko |
dc.subject | 핫엠보싱(hot-embossing) | ko |
dc.subject | Hot-embossing experiment | ko |
dc.title | 연속체 가정을 통한 나노 임프린트 리소그래피 공정 해석 | ko |
dc.type | Thesis | - |
dc.contributor.department | 기계항공공학부 | - |
dc.description.degree | Master | ko |
- Appears in Collections:
- Files in This Item:
- There are no files associated with this item.
Item View & Download Count
Items in S-Space are protected by copyright, with all rights reserved, unless otherwise indicated.