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Ti 전구체의 기상 열분해가 유기 금속 화학 기상 증착에 의한 SrTiO3 박막 특성에 미치는 영향 : Effect of gas-phase thermal decomposition of ti precursors on the properties of SrTiO3 films formed by metal organic chemical vapor deposition
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 문상흡 | - |
| dc.contributor.author | 허정식 | - |
| dc.date.accessioned | 2010-01-27 | - |
| dc.date.available | 2010-01-27 | - |
| dc.date.copyright | 2005. | - |
| dc.date.issued | 2005 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000052294 | kog |
| dc.identifier.uri | https://hdl.handle.net/10371/45354 | - |
| dc.description | 학위논문(박사)--서울대학교 대학원 :응용화학부,2005. | ko |
| dc.format.extent | vii, 72 장 | ko |
| dc.language.iso | ko | ko |
| dc.publisher | 서울대학교 대학원 | ko |
| dc.subject | Ti(O-iPr)2(dpm)2 | ko |
| dc.subject | Ti(O-iPr)2(dpm)2 | ko |
| dc.subject | Ti(mpd)(dpm)2 | ko |
| dc.subject | Ti(mpd)(dpm)2 | ko |
| dc.subject | Ti(2meip)2 | ko |
| dc.subject | Ti(2meip)2 | ko |
| dc.subject | 열분해 | ko |
| dc.subject | Thermal decomposition | ko |
| dc.subject | 활성화 에너지 | ko |
| dc.subject | Activation energy | ko |
| dc.subject | SrTiO3 | ko |
| dc.subject | SrTiO3 | ko |
| dc.title | Ti 전구체의 기상 열분해가 유기 금속 화학 기상 증착에 의한 SrTiO3 박막 특성에 미치는 영향 | ko |
| dc.title.alternative | Effect of gas-phase thermal decomposition of ti precursors on the properties of SrTiO3 films formed by metal organic chemical vapor deposition | ko |
| dc.type | Thesis | - |
| dc.contributor.department | 응용화학부 | - |
| dc.description.degree | Doctor | ko |
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