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Fabrication of 2-dimensional nanopatterned structures using lithography and particle transport : 리소그래피와 입자전달을 이용한 2차원 나노패턴 구조의 생성에 관한 연구

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dc.contributor.advisor최만수-
dc.contributor.author김형철-
dc.date.accessioned2010-01-27T15:21:30Z-
dc.date.available2010-01-27T15:21:30Z-
dc.date.copyright2003.-
dc.date.issued2003-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000058877eng
dc.identifier.urihttps://hdl.handle.net/10371/45666-
dc.descriptionThesis (master`s)--서울대학교 대학원 :기계항공공학부,2003.en
dc.format.extentxv, 141 leavesen
dc.language.isoenen
dc.publisher서울대학교 대학원en
dc.subject나노패터닝en
dc.subjectNanopatterningen
dc.subject나노구조물en
dc.subjectNanostructureen
dc.subject나노입자en
dc.subjectNanoparticleen
dc.subject나노와이어en
dc.subjectNanowireen
dc.subject리소그래피en
dc.subjectLithographyen
dc.subject반응성이온식각en
dc.subjectSinteringen
dc.subject소결en
dc.subjectReactive ion etchingen
dc.subject증발 및 응축법en
dc.subjectEvaporation and condensation methoden
dc.titleFabrication of 2-dimensional nanopatterned structures using lithography and particle transporten
dc.title.alternative리소그래피와 입자전달을 이용한 2차원 나노패턴 구조의 생성에 관한 연구-
dc.typeThesis-
dc.contributor.department기계항공공학부-
dc.description.degreeMasteren
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