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Fabrication of 2-dimensional nanopatterned structures using lithography and particle transport : 리소그래피와 입자전달을 이용한 2차원 나노패턴 구조의 생성에 관한 연구
DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 최만수 | - |
dc.contributor.author | 김형철 | - |
dc.date.accessioned | 2010-01-27T15:21:30Z | - |
dc.date.available | 2010-01-27T15:21:30Z | - |
dc.date.copyright | 2003. | - |
dc.date.issued | 2003 | - |
dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000058877 | eng |
dc.identifier.uri | https://hdl.handle.net/10371/45666 | - |
dc.description | Thesis (master`s)--서울대학교 대학원 :기계항공공학부,2003. | en |
dc.format.extent | xv, 141 leaves | en |
dc.language.iso | en | en |
dc.publisher | 서울대학교 대학원 | en |
dc.subject | 나노패터닝 | en |
dc.subject | Nanopatterning | en |
dc.subject | 나노구조물 | en |
dc.subject | Nanostructure | en |
dc.subject | 나노입자 | en |
dc.subject | Nanoparticle | en |
dc.subject | 나노와이어 | en |
dc.subject | Nanowire | en |
dc.subject | 리소그래피 | en |
dc.subject | Lithography | en |
dc.subject | 반응성이온식각 | en |
dc.subject | Sintering | en |
dc.subject | 소결 | en |
dc.subject | Reactive ion etching | en |
dc.subject | 증발 및 응축법 | en |
dc.subject | Evaporation and condensation method | en |
dc.title | Fabrication of 2-dimensional nanopatterned structures using lithography and particle transport | en |
dc.title.alternative | 리소그래피와 입자전달을 이용한 2차원 나노패턴 구조의 생성에 관한 연구 | - |
dc.type | Thesis | - |
dc.contributor.department | 기계항공공학부 | - |
dc.description.degree | Master | en |
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