Publications
Detailed Information
Design and fabrication of 30nm self-aligned FinFET : 30nm 자기 정렬형 FinFET 설계 및 제작
Cited 0 time in
Web of Science
Cited 0 time in Scopus
- Authors
- Advisor
- 박병국
- Issue Date
- 2004
- Publisher
- 서울대학교 대학원
- Keywords
- self-aligned FinFET ; 이중 게이트 MOSFET ; wide source/drain ; 넓은 소소/드레인 ; non-uniform doping ; 불균일 도핑 ; short channel effect ; 단채널효과
- Description
- Thesis (doctoral)--서울대학교 대학원 :전기·컴퓨터공학부,2004.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000055116
https://hdl.handle.net/10371/45823
- Files in This Item:
- There are no files associated with this item.
Item View & Download Count
Items in S-Space are protected by copyright, with all rights reserved, unless otherwise indicated.