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ESBM 공정 기술의 개발과 관성 센서에의 응용 : Development of the ESBM (Extended Sacrificial Bulk Micromachining) technology and its application to the fabrication of inertial sensor
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 조동일 | - |
| dc.contributor.author | 김종팔 | - |
| dc.date.accessioned | 2010-01-27T23:15:44Z | - |
| dc.date.available | 2010-01-27T23:15:44Z | - |
| dc.date.copyright | 2003. | - |
| dc.date.issued | 2003 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000059230 | kog |
| dc.identifier.uri | https://hdl.handle.net/10371/45876 | - |
| dc.description | 학위논문(박사)--서울대학교 대학원 :전기·컴퓨터공학부,2003. | ko |
| dc.format.extent | ix, 183 p. | ko |
| dc.language.iso | ko | ko |
| dc.publisher | 서울대학교 대학원 | ko |
| dc.subject | ESBM | ko |
| dc.subject | (111)silicon | ko |
| dc.subject | (111) 실리콘 | ko |
| dc.subject | vertical comb | ko |
| dc.subject | 수직 콤 | ko |
| dc.subject | perfect offset | ko |
| dc.subject | 완전 단차 | ko |
| dc.subject | single-crystalline structure | ko |
| dc.subject | 단결정 실리콘 구조물 | ko |
| dc.subject | z-axis accelerometer | ko |
| dc.title | ESBM 공정 기술의 개발과 관성 센서에의 응용 | ko |
| dc.title.alternative | Development of the ESBM (Extended Sacrificial Bulk Micromachining) technology and its application to the fabrication of inertial sensor | ko |
| dc.type | Thesis | - |
| dc.contributor.department | 전기·컴퓨터공학부 | - |
| dc.description.degree | Doctor | ko |
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