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고정밀 단결정 실리콘 초소형 자이로스코프의 설계, 제작 및 평가에 관한 연구 : Design, fabrication and measurement of a single crystalline silicon high precision microgyroscope
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 김용권 | - |
| dc.contributor.author | 이준영 | - |
| dc.date.accessioned | 2010-01-27T23:17:52Z | - |
| dc.date.available | 2010-01-27T23:17:52Z | - |
| dc.date.copyright | 2006. | - |
| dc.date.issued | 2006 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000046567 | kog |
| dc.identifier.uri | https://hdl.handle.net/10371/45918 | - |
| dc.description | 학위논문(박사)--서울大學校 大學院 :전기·컴퓨터 공학부,2006. | ko |
| dc.format.extent | x, 148 장 | ko |
| dc.language.iso | ko | ko |
| dc.publisher | 서울大學校 大學院 | ko |
| dc.subject | 자이로스코프 | ko |
| dc.subject | gyroscope | ko |
| dc.subject | MEMS | ko |
| dc.subject | MEMS | ko |
| dc.subject | 항법급 | ko |
| dc.subject | navigational grade | ko |
| dc.subject | 평면 진동형 | ko |
| dc.subject | in-plane vibratory | ko |
| dc.subject | 정전 용량 감지 | ko |
| dc.subject | capacitive detection | ko |
| dc.subject | SiOG | ko |
| dc.subject | SiOG | ko |
| dc.subject | 웨이퍼 수준 진공 실장 | ko |
| dc.subject | wafer level vacuum package | ko |
| dc.subject | 감도 | ko |
| dc.subject | sensitivity | ko |
| dc.subject | 잡음 | ko |
| dc.subject | noise | ko |
| dc.subject | 분해능 | ko |
| dc.subject | resolution | ko |
| dc.title | 고정밀 단결정 실리콘 초소형 자이로스코프의 설계, 제작 및 평가에 관한 연구 | ko |
| dc.title.alternative | Design, fabrication and measurement of a single crystalline silicon high precision microgyroscope | ko |
| dc.type | Thesis | - |
| dc.contributor.department | 전기·컴퓨터 공학부 | - |
| dc.description.degree | Doctor | ko |
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