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Q 지수를 고려한 대기압형 초소형 Z축 각속도계 : MEMS Z-axis Non-Vacuum Packaged Gyroscope with the Consideration of the Q-factor
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- Authors
- Advisor
- 김용권
- Issue Date
- 2009
- Publisher
- 서울대학교 대학원
- Keywords
- 대기압형 각속도계 ; gyroscope ; Q 지수 ; atmosphere ; 빗 모양 전극 ; Q-factor ; 끝단 효과 보상 ; comb electrode ; 선형 끌림 감쇠 ; end effect ; linear drag
- Description
- 학위논문(박사) --서울대학교 대학원 :전기. 컴퓨터공학부, 2009.2.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000036062
https://hdl.handle.net/10371/46874
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