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서브픽셀 알고리즘을 적용한 TFT-LCD 셀 공정에서의 기준 정렬키 측정 시스템 개발
Development of alignment-key measurement system in TFT-LCD CELL-processing using subpixel algorithm

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Authors
하상모
Advisor
박희재
Issue Date
2007
Publisher
서울대학교 대학원
Keywords
TFT-LCDTFT-LCDCD(Critical Dimension)Subpixel Algorithm자동초점Auto-FocusingSub-pixel Edge DetectionAlignment-Key
Description
학위논문(석사)--서울대학교 대학원 :기계항공공학부,2007.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000045734

http://hdl.handle.net/10371/48187
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Mechanical Aerospace Engineering (기계항공공학부)Theses (Master's Degree_기계항공공학부)
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