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서브픽셀 알고리즘을 적용한 TFT-LCD 셀 공정에서의 기준 정렬키 측정 시스템 개발 : Development of alignment-key measurement system in TFT-LCD CELL-processing using subpixel algorithm
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- Authors
- Advisor
- 박희재
- Issue Date
- 2007
- Publisher
- 서울대학교 대학원
- Keywords
- TFT-LCD ; TFT-LCD ; CD(Critical Dimension) ; Subpixel Algorithm ; 자동초점 ; Auto-Focusing ; Sub-pixel Edge Detection ; Alignment-Key
- Description
- 학위논문(석사)--서울대학교 대학원 :기계항공공학부,2007.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000045734
https://hdl.handle.net/10371/48187
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