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Chemo-mechanical membrane sensor with gold-parylene thin film : 금-패럴린 박막을 이용한 기계-회학 멤브레인 센서
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- Authors
- Advisor
- 이정훈
- Issue Date
- 2007
- Publisher
- 서울대학교 대학원
- Keywords
- 패럴린 ; Parylene ; 박막 ; Thin Membrane ; 표면 응력 ; Chemical sensor ; 기계-화학 센서
- Description
- 학위논문(석사) --서울대학교 대학원 :기계항공공학부,2007.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000044872
https://hdl.handle.net/10371/48190
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