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(A)Study on performance improvement and reliability of poly-Si TFT fabricated by excimer laser crystallization : 레이저 結晶化를 이용한 多結晶 실리콘 薄膜 트랜지스터의 特性 向上 및 信賴度에 관한 硏究
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 한민구 | - |
| dc.contributor.author | 송인혁 | - |
| dc.date.accessioned | 2010-02-02T08:27:52Z | - |
| dc.date.available | 2010-02-02T08:27:52Z | - |
| dc.date.copyright | 2006. | - |
| dc.date.issued | 2006 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000048780 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/48532 | - |
| dc.description | Thesis(doctoral)--서울대학교 대학원 :전기. 컴퓨터공학부,2006. | en |
| dc.format.extent | xii, 141 leaves | en |
| dc.language.iso | en | en |
| dc.publisher | 서울대학교 대학원 | en |
| dc.subject | polycrystalline silicon thin film transistor (poly-Si TFT) | en |
| dc.subject | 다결정 실리콘 박막 트랜지스터 | en |
| dc.subject | excimer laser annealing (ELA) | en |
| dc.subject | 엑시머 레이저 어닐링 | en |
| dc.subject | grain microstructure | en |
| dc.subject | 그레인 미세 구조 | en |
| dc.subject | short channel | en |
| dc.subject | 전계 효과 이동도 | en |
| dc.subject | reliability | en |
| dc.subject | 열반송자 | en |
| dc.subject | 자기 가열 효과 | en |
| dc.subject | holes trapping at backside interface | en |
| dc.subject | self-heating effect | en |
| dc.title | (A)Study on performance improvement and reliability of poly-Si TFT fabricated by excimer laser crystallization | en |
| dc.title.alternative | 레이저 結晶化를 이용한 多結晶 실리콘 薄膜 트랜지스터의 特性 向上 및 信賴度에 관한 硏究 | en |
| dc.type | Thesis | - |
| dc.contributor.department | 전기. 컴퓨터공학부 | - |
| dc.description.degree | Doctor | en |
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