Publications
Detailed Information
A compensation pattern for anti-footing in MEMS fabrication : MEMS 식각공정의 footing 현상방지를 위한 보상패턴에 관한 연구
Cited 0 time in
Web of Science
Cited 0 time in Scopus
- Authors
- Advisor
- 전국진
- Issue Date
- 2003
- Publisher
- 서울대학교 대학원
- Keywords
- footing 현상 ; RIE lag 현상 ; 보상패턴 ; DRIE ; 에치홀
- Description
- Thesis (master`s)--서울대학교 대학원 :전기· 컴퓨터공학부,2003.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000058011
https://hdl.handle.net/10371/48577
- Files in This Item:
- There are no files associated with this item.
Item View & Download Count
Items in S-Space are protected by copyright, with all rights reserved, unless otherwise indicated.