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A study on the sourcedrain junction defect of eximer laser annealed polycrystaline thin film transistor
다결정 실리콘 박막 트랜지스터의 소오스드레인 접합부 결함에 대한 연구

DC Field Value Language
dc.contributor.advisor한민구-
dc.contributor.author김재신-
dc.date.accessioned2010-02-02T09:07:38Z-
dc.date.available2010-02-02T09:07:38Z-
dc.date.copyright2003.-
dc.date.issued2003-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000057467eng
dc.identifier.urihttp://hdl.handle.net/10371/48583-
dc.descriptionThesis (master`s)--서울대학교 대학원 :전기· 컴퓨터공학부,2003.en
dc.format.extentiii, 47 leavesen
dc.language.isoenen
dc.publisher서울대학교 대학원en
dc.subject다결정 실리콘en
dc.subjectPolycrystalline siliconen
dc.subject박막 트랜지스터en
dc.subjectThin film transistoren
dc.subjectELAen
dc.subjectElaen
dc.subjectIon implantationen
dc.subjectDamageen
dc.subjectDiffractionen
dc.titleA study on the sourcedrain junction defect of eximer laser annealed polycrystaline thin film transistoren
dc.title.alternative다결정 실리콘 박막 트랜지스터의 소오스드레인 접합부 결함에 대한 연구-
dc.typeThesis-
dc.contributor.department전기· 컴퓨터공학부-
dc.description.degreeMasteren
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Electrical and Computer Engineering (전기·정보공학부)Theses (Master's Degree_전기·정보공학부)
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