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A study on the sourcedrain junction defect of eximer laser annealed polycrystaline thin film transistor : 다결정 실리콘 박막 트랜지스터의 소오스드레인 접합부 결함에 대한 연구
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 한민구 | - |
| dc.contributor.author | 김재신 | - |
| dc.date.accessioned | 2010-02-02T09:07:38Z | - |
| dc.date.available | 2010-02-02T09:07:38Z | - |
| dc.date.copyright | 2003. | - |
| dc.date.issued | 2003 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000057467 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/48583 | - |
| dc.description | Thesis (master`s)--서울대학교 대학원 :전기· 컴퓨터공학부,2003. | en |
| dc.format.extent | iii, 47 leaves | en |
| dc.language.iso | en | en |
| dc.publisher | 서울대학교 대학원 | en |
| dc.subject | 다결정 실리콘 | en |
| dc.subject | Polycrystalline silicon | en |
| dc.subject | 박막 트랜지스터 | en |
| dc.subject | Thin film transistor | en |
| dc.subject | ELA | en |
| dc.subject | Ela | en |
| dc.subject | Ion implantation | en |
| dc.subject | Damage | en |
| dc.subject | Diffraction | en |
| dc.title | A study on the sourcedrain junction defect of eximer laser annealed polycrystaline thin film transistor | en |
| dc.title.alternative | 다결정 실리콘 박막 트랜지스터의 소오스드레인 접합부 결함에 대한 연구 | - |
| dc.type | Thesis | - |
| dc.contributor.department | 전기· 컴퓨터공학부 | - |
| dc.description.degree | Master | en |
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