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스퍼터링법에 의한 YBa₂Cu₃3O7-x 박막 제조 및 초전도 디지털 소자 응용 : Fabrication of YBa₂Cu₃3O7-x thin film by using rf sputtering and its application to superconducting digital device
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 박순자 | - |
| dc.contributor.author | 김영환 | - |
| dc.date.accessioned | 2010-02-05T06:39:57Z | - |
| dc.date.available | 2010-02-05T06:39:57Z | - |
| dc.date.copyright | 1997. | - |
| dc.date.issued | 1997 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000079653 | kog |
| dc.identifier.uri | https://hdl.handle.net/10371/50786 | - |
| dc.description | 학위논문(박사)--서울대학교 대학원 :무기재료공학과,1997. | ko |
| dc.format.extent | ix, 126 장 | ko |
| dc.language.iso | ko | ko |
| dc.publisher | 서울대학교 대학원 | ko |
| dc.subject | off-axis rf 마그네트론 스퍼터링 | ko |
| dc.subject | off-axis rf magnetron sputtering | ko |
| dc.subject | YBa2Cu3O7-x 박막 | ko |
| dc.subject | YBa2Cu3O7-x thin films | ko |
| dc.subject | 산소 분압 | ko |
| dc.subject | oxygen partial pressure | ko |
| dc.subject | 분광법 | ko |
| dc.subject | optical emission spectroscopy | ko |
| dc.subject | 단자속 양자 회로 | ko |
| dc.subject | single flux quantum logic circuit | ko |
| dc.title | 스퍼터링법에 의한 YBa₂Cu₃3O7-x 박막 제조 및 초전도 디지털 소자 응용 | ko |
| dc.title.alternative | Fabrication of YBa₂Cu₃3O7-x thin film by using rf sputtering and its application to superconducting digital device | ko |
| dc.type | Thesis | - |
| dc.contributor.department | 무기재료공학과 | - |
| dc.description.degree | Doctor | ko |
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