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Deposition and solid phase crystallization of a-Si Ge films and application to thin film transistor : 비정질 Si Ge 합금 박막의 증착 및 이의 고상 결정화 거동과 박막 트랜지스터에의 응용
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 김상주 | - |
| dc.contributor.author | 김진원 | - |
| dc.date.accessioned | 2010-02-05T06:41:46Z | - |
| dc.date.available | 2010-02-05T06:41:46Z | - |
| dc.date.copyright | 1996. | - |
| dc.date.issued | 1996 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000082186 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/50821 | - |
| dc.description | Thesis (doctoral)--서울대학교 대학원 :금속공학과 재료공학전공,1996. | en |
| dc.format.extent | ix, 100 p. | en |
| dc.language.iso | en | en |
| dc.publisher | 서울대학교 대학원 | en |
| dc.subject | solid phase crystallization | en |
| dc.subject | thin film transistor | en |
| dc.subject | low pressure chemical vapor deposition | en |
| dc.subject | Si₂H? | en |
| dc.subject | GeH₄ | en |
| dc.title | Deposition and solid phase crystallization of a-Si Ge films and application to thin film transistor | en |
| dc.title.alternative | 비정질 Si Ge 합금 박막의 증착 및 이의 고상 결정화 거동과 박막 트랜지스터에의 응용 | - |
| dc.type | Thesis | - |
| dc.contributor.department | 금속공학과 재료공학전공 | - |
| dc.description.degree | Doctor | en |
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