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리튬 이차전지용 리튬망간산화물 박막제조에 관한 연구 : A Study on the fabrication of Li-Mn-O thin films for rechargeable lithium batteries
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- Authors
- Advisor
- 주승기
- Issue Date
- 1996
- Publisher
- 서울대학교 대학원
- Keywords
- 리튬 이차박막전지 ; thin-film lithium battery ; 스피넬 구조 ; spinel structure ; 리튬망간산화물 ; RF magnetron sputtering ; RF 마그네트론 스퍼터링 ; rapid thermal annealing (RTA) ; 급속열처리 ; substrate heating
- Description
- 학위논문(박사)--서울대학교 대학원 :금속공학과,1996.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000081559
https://hdl.handle.net/10371/50871
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