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RF 마그네트론 스퍼터링법으로 제조한 permalloy (NiFe) 박막의 내부 응력 및 자기적 성질 : The Internal stress and magnetic properties of permalloy (NiFe) thin films manufactured by RF magnetron sputtering method
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 김상주 | - |
| dc.contributor.author | 김현태 | - |
| dc.date.accessioned | 2010-02-05T06:44:33Z | - |
| dc.date.available | 2010-02-05T06:44:33Z | - |
| dc.date.copyright | 1995. | - |
| dc.date.issued | 1995 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000085082 | kog |
| dc.identifier.uri | https://hdl.handle.net/10371/50876 | - |
| dc.description | 학위논문(박사)--서울대학교 대학원 :금속공학과,1995. | ko |
| dc.format.extent | xi, 127 장 | ko |
| dc.language.iso | ko | ko |
| dc.publisher | 서울대학교 대학원 | ko |
| dc.subject | soft magnetic properties | ko |
| dc.subject | 연자성 | ko |
| dc.subject | thin film | ko |
| dc.subject | 박막 | ko |
| dc.subject | target | ko |
| dc.subject | 타게트 | ko |
| dc.subject | deposition rate | ko |
| dc.subject | 중착속도 | ko |
| dc.subject | composition of thin film | ko |
| dc.subject | 박막조성 | ko |
| dc.title | RF 마그네트론 스퍼터링법으로 제조한 permalloy (NiFe) 박막의 내부 응력 및 자기적 성질 | ko |
| dc.title.alternative | The Internal stress and magnetic properties of permalloy (NiFe) thin films manufactured by RF magnetron sputtering method | ko |
| dc.type | Thesis | - |
| dc.contributor.department | 금속공학과 | - |
| dc.description.degree | Doctor | ko |
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