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Controlled selective growth of ZnO nanorod and microrod arrays on Si substrates by a wet chemical method
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Yong-Jin | - |
dc.contributor.author | Lee, Chul-Ho | - |
dc.contributor.author | Hong, Young Joon | - |
dc.contributor.author | Yi, Gyu-Chul | - |
dc.contributor.author | Kim, Sung Soo | - |
dc.contributor.author | Cheong, Hyeonsik | - |
dc.date.accessioned | 2009-07-14T02:45:04Z | - |
dc.date.available | 2009-07-14T02:45:04Z | - |
dc.date.issued | 2006-10-20 | - |
dc.identifier.citation | Appl. Phys. Lett. 89, 163128 (2006) | en |
dc.identifier.issn | 0003-6951 (print) | - |
dc.identifier.issn | 1077-3118 (online) | - |
dc.identifier.uri | http://link.aip.org/link/?APPLAB/89/163128/1 | - |
dc.identifier.uri | https://hdl.handle.net/10371/5407 | - |
dc.description.abstract | The use of a wet chemical method to selectively grow ZnO microrod and nanorod arrays on Si substrates is described. To control the size and position of the ZnO microrods and nanorods, polymethylmethacrylate PMMA submicron patterns were prepared on the Si substrates with an intermediate ZnO layer using e-beam lithography. Selective growth of the ZnO structures was achieved by the absence of ZnO nucleation sites on the PMMA mask, resulting in position-controlled growth of ZnO structures only on patterned holes where the ZnO layer was exposed. In addition, the diameters of the ZnO microrods were determined by the patterned hole size, and the diameters as small as 250 nm were obtained when a hole diameter of 250 nm was employed. The structural and optical characteristics of the ZnO microrods were further investigated using x-ray diffraction, transmission | en |
dc.description.sponsorship | This work was financially supported under the National Creative Research Initiative Project by the KOSEF. One of the authors (H.C.) was supported by the KOSEF through the Quantum Photonic Science Research Center. | en |
dc.language.iso | en | en |
dc.publisher | American Institute of Physics | en |
dc.title | Controlled selective growth of ZnO nanorod and microrod arrays on Si substrates by a wet chemical method | en |
dc.type | Article | en |
dc.contributor.AlternativeAuthor | 김용진 | - |
dc.contributor.AlternativeAuthor | 이철호 | - |
dc.contributor.AlternativeAuthor | 홍영준 | - |
dc.contributor.AlternativeAuthor | 이규철 | - |
dc.contributor.AlternativeAuthor | 김성수 | - |
dc.contributor.AlternativeAuthor | 정현식 | - |
dc.identifier.doi | 10.1063/1.2364162 | - |
dc.citation.journaltitle | Applied Physics Letters | - |
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