High Modulus Spin-On Organosilicate Glasses for Nanoporous Applications

Abstract

Both the modulus and hardness of a conventional methylsilsesquioxane-type organosilicate, typically synthesized from the methyltrimethoxysilane monomer, can be substantially improved by incorporating organic bridging units through additions of the bis(triethoxysilyl)ethane monomer. The microstructural basis for these enhanced properties is described in this Communication.