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Organosilicate Spin-on Glasses II. Effect of Physical Modification on Mechanical Properties

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Authors
Toivola, Yvete; Kim, Suhan; Cook, Robert F.; Char, Kookheon; Lee, Jin-Kyu; Yoon, Do Y.; Rhee, Hee-Woo; Kim, Sang Youl; Jin, Moon Young
Issue Date
2004-01-26
Publisher
Electrochemical Society
Citation
J. Electrochem. Soc., 151, F45 (2004)
Abstract
Porous copolymer films were synthesized from a methylsilsequioxane:1,2-bis(trimethoxysilyl)ethane (MSSQ:BTMSE) matrix and either an aromatic-core or aliphatic-core porogen at 10, 20, or 30 wt % porogen loading. Films were characterized using scanning electron microscopy (SEM), IR spectroscopy, and ellipsometry. Depth-sensing indentation experiments were performed to measure apparent film modulus, E, and hardness, H. Indentation load-displacement traces and SEM images were used to determine the threshold load for cracking, Pc. The aliphatic-core porogen produced a greater porosity film than the aromatic-core porogen for 10 wt % loading and smaller porosity films for 20 and 30 wt % loadings. IR spectra, normalized for film thickness and density, indicated decreased O-Si-O networking in porous MSSQ:BTMSE films. The combination of increased porosity and decreased O-Si-O networking led to a decreased apparent E and H relative to the unmodified MSSQ:BTMSE film. However, low-porosity (approximately 7%), aliphatic-porogen MSSQ:BTMSE films are optimized relative to unmodified MSSQ with smaller dielectric constant and greater E and H.
ISSN
0013-4651
Language
English
URI
http://hdl.handle.net/10371/5771
DOI
https://doi.org/10.1149/1.1643073
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Chemical and Biological Engineering (화학생물공학부)Journal Papers (저널논문_화학생물공학부)
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