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Modeling of the rate of solid-phase epitaxial growth in Si₁-xGex alloys : 고체상 에피텍시에서 실리콘-게르마늄 합금의 성장 속도 모델링

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Authors

서갑양

Advisor
이홍희
Issue Date
1998
Publisher
서울대학교 대학원
Description
Thesis (master`s)--서울대학교 대학원 :화학공학과,1998.
Language
English
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000075661

https://hdl.handle.net/10371/58958
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