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Silicon thin-fin etching using chemical dry etching : 화학적 건식 식각을 이용한 실리콘의 얇은 핀 식각
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- Authors
- Advisor
- 박병국
- Issue Date
- 2010
- Publisher
- 서울대학교 대학원
- Keywords
- 플라즈마 ; Plasma ; 화학건식식각 ; Chemical dry etching ; 등방성 식각 ; Isotropic etching ; 선택비 ; selectivity ; 플래시 메모리 ; Flash memory
- Description
- Thesis(masters) --서울대학교 대학원 :전기. 컴퓨터공학부,2010.2.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000033520
https://hdl.handle.net/10371/64972
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