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Recessed Ohmic & Gate Process of AlGaNGaN HEMTs : Recessed Ohmic & Gate 공정을 통한 AlGaNGaN HEMTs 에 관한 연구
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- Authors
- Advisor
- 서광석
- Issue Date
- 2010
- Publisher
- 서울대학교 대학원
- Keywords
- GaN ; GaN ; AlGaN ; AlGaN ; 리세스 ; recess ; 오믹 ; ohmic ; 게이트 ; gate ; BCl3 ; BCl3 ; Cl2 ; Cl2 ; ICP ; ICP ; HEMT ; pulsed I-V ; HEMT
- Description
- Thesis(masters) --서울대학교 대학원 :전기. 컴퓨터공학부,2010.2.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000033408
https://hdl.handle.net/10371/65232
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