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Self-annealing effect of electrolessly deposited copper thin films based on Co(II)-ethylenediamine as a reducing agent
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, Chang Hwa | - |
dc.contributor.author | Kim, Jae Jeong | - |
dc.date.accessioned | 2010-05-12T05:21:56Z | - |
dc.date.available | 2010-05-12T05:21:56Z | - |
dc.date.issued | 2004-01-20 | - |
dc.identifier.citation | Journal of Vacuum Science and Technology B Microelectronics and Nanometer Structures 22(1), 180-184 | en |
dc.identifier.issn | 1071-1023 | - |
dc.identifier.uri | https://hdl.handle.net/10371/65988 | - |
dc.description.abstract | A study on the self-annealing of electrolessly deposited copper films on blanket TiN wafers was
carried out for different thicknesses. Decrease of 60%–90% in the sheet resistances of 100–260 nm thick copper films was observed after self-annealing. Changes in the copper films microstructure were also investigated, including the enhancement of their ~111! orientation and grain growth. The pinning of chlorine was found to be influential for self-annealing and Pd activation for electroless deposition played an important role in self-annealing as to microstructural dislocations and defects. In addition, the thinner copper film was more affected by self-annealing. After deposition at room temperature, elevated temperatures accelerated self-annealing and caused decreases in resistivities. The resistivity of a 260 nm thick copper was reduced to 1.7 mVcm at 70 °C. | en |
dc.language.iso | en | en |
dc.publisher | American Vacuum Society | en |
dc.subject | copper | en |
dc.subject | metallic thin films | en |
dc.subject | crystal microstructure | en |
dc.subject | grain growth | en |
dc.subject | dislocations | en |
dc.subject | electrical resistivity | en |
dc.title | Self-annealing effect of electrolessly deposited copper thin films based on Co(II)-ethylenediamine as a reducing agent | en |
dc.type | Article | en |
dc.contributor.AlternativeAuthor | 이창화 | - |
dc.contributor.AlternativeAuthor | 김재정 | - |
dc.identifier.doi | 10.1116/1.1642640 | - |
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