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Physically heterogeneous substrate and its application to low duty ratio patterning : 물리적 이질 표면을 이용한 저 듀티비 패터닝
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- Authors
- Advisor
- 이홍희
- Issue Date
- 2005
- Publisher
- 서울대학교 대학원
- Keywords
- 이질 표면 ; Heterogeneous surface ; 박리 ; Dewetting ; 메니스커스 ; Meniscus ; 듀티비 ; Duty ratio ; 패터닝 ; Patterning ; 리소그래피 ; Lithography ; 연성 몰드 ; Elastomeric mold ; 불안정성 ; Instability
- Description
- Thesis(master`s)--서울대학교 대학원 :응용화학부,2005.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000051233
https://hdl.handle.net/10371/66356
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