Publications
Detailed Information
Synthesis and characterization of Poly(ethyleneoxide)s and Poly(methyhydrolsiloxane)s derivatives for extreme-UV lithography application
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이종찬 | - |
| dc.contributor.author | 원정혜 | - |
| dc.date.accessioned | 2010-05-14T08:02:48Z | - |
| dc.date.available | 2010-05-14T08:02:48Z | - |
| dc.date.copyright | 2004. | - |
| dc.date.issued | 2004 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000055609 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/66374 | - |
| dc.description | Thesis (master`s)--서울대학교 대학원 :응용화학부,2004. | en |
| dc.format.extent | vi, 51 leaves | en |
| dc.language.iso | en | en |
| dc.publisher | 서울대학교 대학원 | en |
| dc.subject | EUV 리소그라피 | en |
| dc.subject | Euv lithography | en |
| dc.subject | 폴리실세스퀴녹세인 | en |
| dc.subject | Poss containing polymer | en |
| dc.subject | 양이온 중합 | en |
| dc.subject | Cationic polymerization | en |
| dc.subject | 개환 중합 | en |
| dc.subject | Hydrosilylation | en |
| dc.subject | 하이드로 실릴레이션 | en |
| dc.subject | High transparency and sensitivity | en |
| dc.subject | 높은 투과도와 감도 | en |
| dc.subject | 식각 저항성 | en |
| dc.title | Synthesis and characterization of Poly(ethyleneoxide)s and Poly(methyhydrolsiloxane)s derivatives for extreme-UV lithography application | en |
| dc.type | Thesis | - |
| dc.contributor.department | 응용화학부 | - |
| dc.description.degree | Master | en |
- Appears in Collections:
- Files in This Item:
- There are no files associated with this item.
Item View & Download Count
Items in S-Space are protected by copyright, with all rights reserved, unless otherwise indicated.