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Local Corrosion of the Oxide Passivation Layer during Cu Chemical Mechanical Polishing
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kang, Min Cheol | - |
dc.contributor.author | Kim, Yung Jun | - |
dc.contributor.author | Koo, Hyo-Chol | - |
dc.contributor.author | Cho, Sung Ki | - |
dc.contributor.author | Kim, Jae Jeong | - |
dc.date.accessioned | 2010-07-05T06:21:30Z | - |
dc.date.available | 2010-07-05T06:21:30Z | - |
dc.date.issued | 2009-10-01 | - |
dc.identifier.citation | Electrochemical and Solid state Letters, 12(12), H433-H436 | en |
dc.identifier.issn | 1099-0062 | - |
dc.identifier.uri | https://hdl.handle.net/10371/68295 | - |
dc.description.abstract | In this article, we analyze the effect of complexing agents in Cu chemical mechanical polishing slurry on the formation of oxide
and the evolution of stress. The passivation property and surface morphology of the oxide on the surface showed significant differences depending on the kind of complexing agent. Oxalic acid showed fast oxide formation with poor passivation performance, and this caused large tensile stress evolution over 250 MPa in the Cu film. The synergetic effect of stress evolution and temperature increase due to the friction during the polishing caused severe pitting of the Cu surface after polishing in oxalic-acidbased slurry. | en |
dc.description.sponsorship | This work was supported by the Korea Science and Engineering
Foundation through the Research Center for Energy Conversion and Storage, the Fundamental Research and Development Program for Core Technology of Materials funded by the Korean Ministry of Commerce, Industry, and Energy, and by the Institute of Chemical Processes at Seoul National University. | en |
dc.language.iso | en | en |
dc.publisher | Electrochemical Society | en |
dc.title | Local Corrosion of the Oxide Passivation Layer during Cu Chemical Mechanical Polishing | en |
dc.type | Article | en |
dc.contributor.AlternativeAuthor | 강민철 | - |
dc.contributor.AlternativeAuthor | 김영준 | - |
dc.contributor.AlternativeAuthor | 구효철 | - |
dc.contributor.AlternativeAuthor | 조성기 | - |
dc.contributor.AlternativeAuthor | 김재정 | - |
dc.identifier.doi | 10.1149/1.3236391 | - |
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