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Influence of substrate temperature on the growth rate and the composition of calcium phosphate films prepared by using pulsed laser deposition

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Authors
Han, Jung-Suk; Kim, Hye-Lee; Lee, Sang-Wook; Kim, Young-Sun; Kim, Dae-Joon; Lee, Won-Jun
Issue Date
2006-12
Publisher
Korean Physical Society = 한국물리학회
Citation
Journal of the Korean Physical Society 49, 2418-2422
Keywords
pulsed laser depositioncalcium phosphatehydroxyapatitesubstrate temperature
Abstract
Calcium phosphate films were prepared by using a pulsed laser deposition (PLD) technique with
a KrF excimer laser (248 nm, 2 J/cm2), and the influence of the substrate temperature on the
growth rate and the composition of those films was studied at substrate temperatures ranging from
room temperature to 700 C. Sintered hydroxyapatite (HA) was used as the target, and the films
were deposited under 0.25 Torr of H2O. The temperature dependency of the erosion of the film by
the energetic deposition flux is also discussed. The substrate temperature critically affected the
growth rate and the composition of the deposited films. The mass of the PLD calcium phosphate
film decreased 8 % with increasing substrate temperature from room temperature to 700 C, and
this was explained by enhanced sublimation of the film by the bombardment of the deposition
flux at higher substrate temperatures. The Ca/P ratio also gradually increased from 1.7 to 1.9
with increasing temperature because the amount of phosphorus sublimated from the growing film
increased more rapidly as compared with the amount of calcium that sublimated. A high density
and a strong (300) preferred orientation were also observed at high substrate temperatures.
ISSN
0374-4884
Language
English
URI
http://hdl.handle.net/10371/68826
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