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Characteristics of Calcium Phosphate Films Prepared by Pulsed Laser Deposition under Various Water Vapor Pressures

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Authors
Lee, Won-Jun; Lee, Sang-Wook; Kim, Hye-Lee; Kim, Dae-Joon; Han, Jung-Suk
Issue Date
2005-06
Publisher
한국물리학회
Citation
Journal of the Korean Physical Society 47152 (2005)
Keywords
Pulsed laser depositionCalcium phosphateHydroxyapatiteAmbient pressure
Abstract
Calcium phosphate films were prepared by using a pulsed laser deposition (PLD) technique
with a KrF excimer laser (248 nm, 2 J/cm²) under a wide range of H2O pressures at a substrate
temperature of 600℃. Sintered hydroxyapatite (HA) was used as the target. The background
H2O pressure during deposition critically affected the density and the composition of the deposited
films. With increasing H2O pressure, the growth rate increased, and the mass deposited was almost
constant. Consequently, the density gradually decreased with H2O pressure, resulting in a porous
microstructure under 0.37 Torr. The Ca/P ratio of the film decreased with H2O pressure, and the
crystal structure of the deposited film changed in accordance with the Ca/P ratio. The observed
peaks were from hydroxyapatite (Ca/P = 1.67) for H2O pressures above 0.13 Torr, and the peaks
from high Ca/P phases, such as tetracalcium phosphate [Ca4O(PO4)2, Ca/P = 2] and CaO (Ca/P
= ∞), were observed for the film deposited at 0.02 Torr. A high-density hydroxyapatite film with
a high degree of crystallinity was obtained under a H2O pressure of 0.25 Torr.
ISSN
0374-4884
Language
English
URI
http://hdl.handle.net/10371/74069
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College of Dentistry/School of Dentistry (치과대학/치의학대학원)Dept. of Dentistry (치의학과)Journal Papers (저널논문_치의학과)
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