Publications
Detailed Information
Characteristics of Calcium Phosphate Films Prepared by Pulsed Laser Deposition under Various Water Vapor Pressures
Cited 0 time in
Web of Science
Cited 0 time in Scopus
- Authors
- Issue Date
- 2005-06
- Publisher
- 한국물리학회
- Citation
- Journal of the Korean Physical Society 47152 (2005)
- Keywords
- Pulsed laser deposition ; Calcium phosphate ; Hydroxyapatite ; Ambient pressure
- Abstract
- Calcium phosphate films were prepared by using a pulsed laser deposition (PLD) technique
with a KrF excimer laser (248 nm, 2 J/cm²) under a wide range of H2O pressures at a substrate
temperature of 600℃. Sintered hydroxyapatite (HA) was used as the target. The background
H2O pressure during deposition critically affected the density and the composition of the deposited
films. With increasing H2O pressure, the growth rate increased, and the mass deposited was almost
constant. Consequently, the density gradually decreased with H2O pressure, resulting in a porous
microstructure under 0.37 Torr. The Ca/P ratio of the film decreased with H2O pressure, and the
crystal structure of the deposited film changed in accordance with the Ca/P ratio. The observed
peaks were from hydroxyapatite (Ca/P = 1.67) for H2O pressures above 0.13 Torr, and the peaks
from high Ca/P phases, such as tetracalcium phosphate [Ca4O(PO4)2, Ca/P = 2] and CaO (Ca/P
= ∞), were observed for the film deposited at 0.02 Torr. A high-density hydroxyapatite film with
a high degree of crystallinity was obtained under a H2O pressure of 0.25 Torr.
- ISSN
- 0374-4884
- Language
- English
- Files in This Item:
Item View & Download Count
Items in S-Space are protected by copyright, with all rights reserved, unless otherwise indicated.