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Influences of Ambient Gases on the Structure and the Composition of Calcium Phosphate Films Prepared by Pulsed Laser Deposition

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Authors
Kim, Hye-Lee; Kim, Young-Sun; Kim, Dae-Joon; Lee, Won-Jun; Han, Jung-Suk
Issue Date
2006-11
Publisher
한국물리학회
Citation
Journal of the Korean Physical Society 49 2019 (2006)
Keywords
Pulsed laser depositionHydroxyapatiteAmbient gasesTitanium
Abstract
Calcium phosphate films were prepared by using a pulsed KrF-laser deposition (PLD) method
with a hydroxyapatite target in various ambient gases, such as Ar, O2 and H2O. The influence of
the ambient gas on the properties of the deposited films was investigated. The chamber pressure
and the substrate temperature were fixed at 0.25 Torr and 600℃, respectively. Calcium-rich
amorphous calcium phosphate films were deposited with a low density in Ar due to the preferential
resputtering of phosphorus from the growing film. In an O2 ambient, the density and the Ca/P
ratio of the films were similar to those of the target. However, the deposited film was amorphous
calcium phosphate and did not contain OH− groups. Polycrystalline hydroxyapatite films can be
deposited in a H2O ambient because a sufficient supply of OH− groups from the ambient gas is
essential for the growth of a hydroxyapatite film.
ISSN
0374-4884
Language
English
URI
http://hdl.handle.net/10371/74070
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College of Dentistry/School of Dentistry (치과대학/치의학대학원)Dept. of Dentistry (치의학과)Journal Papers (저널논문_치의학과)
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