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Large-Area Dual-Scale Metal Transfer by Adhesive Force

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Authors
Kwak, Moon Kyu; Kim, Tae-il; Kim, Pilnam; Lee, Hong H.; Suh, Kahp Y.
Issue Date
2009-04-20
Publisher
Wiley-Blackwell
Citation
Small 2009, 5, 928
Keywords
adhesionmetal transferpattern transferpolarizersLIGHT-EMITTING-DIODESNANOIMPRINT LITHOGRAPHYNANOLITHOGRAPHYFABRICATION
Abstract
A dual-scale metal transfer technique is presented to generate metal patterns with two different length scales from a single master. An adhesive polymer layer is brought in contact with the metal-coated surface in two sequential steps to transfer metal layers from both ridges and valleys of the mold aided by the difference in adhesive force (see image).
ISSN
1613-6810
Language
English
URI
http://hdl.handle.net/10371/9544
DOI
https://doi.org/10.1002/smll.200801262
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Mechanical Aerospace Engineering (기계항공공학부)Journal Papers (저널논문_기계항공공학부)
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