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Room Temperature Detachment Nanolithography Using a Rigiflex Polymeric Mold
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Jae Kwan | - |
dc.contributor.author | Suh, Kahp Y. | - |
dc.date.accessioned | 2009-09-16T23:18:08Z | - |
dc.date.available | 2009-09-16T23:18:08Z | - |
dc.date.issued | 2008-07 | - |
dc.identifier.citation | J. Nanosci. Nanotechnol. 8, 3621 (2008) | en |
dc.identifier.issn | 1533-4880 | - |
dc.identifier.uri | https://hdl.handle.net/10371/9622 | - |
dc.description.abstract | We report on detachment nanolithography of an organic thin film at room temperature mediated by ultraviolet (UV) exposure. A nanopatterned, UV curable polyurethane acrylate (PUA) mold was placed on a spin-coated organic film made of 4,4'-bis[N-1-napthyl-N-phenyl-amino]biphenyl (NPB) under a low pressure (1-2 bar). A higher work of adhesion at the organic/mold interface induced detachment of the contacting layer on silicon or gold substrate, resulting in well-defined nanopatterns without a residual layer. The detachment was highly improved by a short-term UV exposure, rendering the film surface free from contaminant hydrocarbons with a lower cohesive force, as confirmed by Fourier transform infrared (FTIR) spectroscopy and measurements of contact angle of water. | en |
dc.description.sponsorship | The work was supported by the Korea Science and Engineering Foundation (KOSEF)grant funded by the Korea government (MOST) (No.
2007-02605) and in part supported by the Micro Thermal System Research Center of Seoul National University. | en |
dc.language.iso | en | - |
dc.publisher | American Scientific Publishers | en |
dc.subject | Nanolithography | en |
dc.subject | Detachment | en |
dc.subject | Mold | en |
dc.subject | Room Temperature | en |
dc.subject | LIGHT-EMITTING-DIODES | en |
dc.subject | NANOIMPRINT LITHOGRAPHY | en |
dc.subject | SOFT LITHOGRAPHY | en |
dc.subject | FABRICATION | en |
dc.subject | NANOSCALE | en |
dc.title | Room Temperature Detachment Nanolithography Using a Rigiflex Polymeric Mold | en |
dc.type | Article | en |
dc.contributor.AlternativeAuthor | 김재관 | - |
dc.contributor.AlternativeAuthor | 서갑양 | - |
dc.identifier.doi | 10.1166/jnn.2008.162 | - |
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