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Issue Date	Title / Author(s) / Citation	File	Altmetrics
2013-08	Development of sacrificial layer wet etch process of TiNi for nano-electro-mechanical device application Park, Byung Kyu; Choi, Woo Young; Cho, Eou Sik; Cho, Il Hwan JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE, Vol.13 No.4, pp.410-414	DOI