S-Space

Browse

Author

Showing results 1 to 2 of 2

Issue Date	Title / Author(s) / Citation	File	Altmetrics
2009-12	A virtual metrology system for semiconductor manufacturing Kang, Pilsung; Lee, Hyoung-joo; Cho, Sungzoon; Kim, Dongil; Park, Chan-Kyoo; Doh, Seungyong; Park, Jinwoo EXPERT SYSTEMS WITH APPLICATIONS; Vol.36 10; 12554-12561	DOI
2011-03	Virtual metrology for run-to-run control in semiconductor manufacturing Kang, Pilsung; Kim, Dongil; Lee, Hyoung-joo; Doh, Seungyong; Cho, Sungzoon EXPERT SYSTEMS WITH APPLICATIONS; Vol.38 3; 2508-2522	DOI